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A Multimode Transverse Dynamic Force Microscope - Design, Identification, and Control

Zhang K. Mechanical Engineering Department, University of Bristol, Bristol, BS8 1TR, United Kingdom|
Miles M. | Burgess S.C. Modeling Evolutionary Algorithms Simulation and Artificial Intelligence, Faculty of Electrical and Electronics Engineering, Ton Duc Thang University, Ho Chi Minh City, 756636, Viet Nam| Nguyen T.T. Department of Electrical and Electronic Engineering, University of Manchester, Manchester, M13 9PL, United Kingdom| Edwards C. Hitachi R and D, Hitachi, Horiguchi, Hitachinaka, Ibaraki, 312-0034, Japan| Antognozzi M. School of Physics, University of Bristol, Bristol, United Kingdom| Herrmann G. University of ExeterEX4 4SB, United Kingdom| Hatano T. School of Physics, University of Bristol, Bristol, BS8 1TL, United Kingdom|

IEEE Transactions on Industrial Electronics Số 6, năm 2020 (Tập 67, trang 4729-4740)

DOI: 10.1109/TIE.2019.2924618

Tài liệu thuộc danh mục: Scopus

IEEE Trans Ind Electron

English

Từ khóa: Digital control systems; Field programmable gate arrays (FPGA); Microscopes; Robust control; Scanning probe microscopy; Closed-loop control; Control arithmetic; Equipment running; Fixed-point implementation; Force detection; Nanoprecision; Sensing mechanism; Transverse dynamics; Fixed point arithmetic
Tóm tắt tiếng anh
The transverse dynamic force microscope (TDFM) and its shear force sensing principle permit true noncontact force detection in contrast to typical atomic force microscopes. The two TDFM measurement signals for the cantilever allow, in principle, two different scanning modes of which, in particular, the second presented here permits a full-scale noncontact scan. Previous research work mainly focused on developing the sensing mechanism, whereas this paper investigates the vertical axis dynamics for advanced robust closed-loop control. This paper presents a new TDFM digital control solution, built on field-programmable gate array equipment running at high implementation frequencies. The integrated control system allows the implementation of online customizable controllers, and raster scans in two modes at very high detection bandwidth and nanoprecision. Robust control algorithms are designed, implemented, and practically assessed. The two realized scanning modes are experimentally evaluated by imaging nanospheres with known dimensions in wet conditions. � 1982-2012 IEEE.

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